Fabrication of 3D high-aspect-ratio microfluidic components using laser machining and LIGA

Muralidhar K. Ghantasala; Richard C. Barber; Nicolai A. Moldovan; Derrick C. Mancini; Erol C. Harvey

doi:10.1117/12.514474

14 October 2003 Fabrication of 3D high-aspect-ratio microfluidic components using laser machining and LIGA

Muralidhar K. Ghantasala, Richard C. Barber, Nicolai A. Moldovan, Derrick C. Mancini, Erol C. Harvey

Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514474
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India

Abstract

This paper mainly reviews the current status of the LIGA fabrication technology for use in microfluidics applications. It also presents the work that the group is involved in the fabrication of 3-D high aspect ratio structures. This work explored the possibility of using LIGA and excimer laser micromachining as complimentary processes in two sequential steps for making some of the components required for fluidic applications. A microflask is designed and fabricated using this combination of processing technology. The details of the design and fabrication technology are presented in this paper.

Citation Download Citation

Muralidhar K. Ghantasala, Richard C. Barber, Nicolai A. Moldovan, Derrick C. Mancini, and Erol C. Harvey "Fabrication of 3D high-aspect-ratio microfluidic components using laser machining and LIGA", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); https://doi.org/10.1117/12.514474

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