Indium tin oxide coatings on flexible and rigid substrates for application in smart windows

M. S. Vinodh; Sangeneni Mohan; P. Subaskar; - Rathnakar; H. Bhojraj; H. Narayanamurthy

doi:10.1117/12.514907

14 October 2003 Indium tin oxide coatings on flexible and rigid substrates for application in smart windows

M. S. Vinodh, Sangeneni Mohan, P. Subaskar, - Rathnakar, H. Bhojraj, H. Narayanamurthy

Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514907
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India

Abstract

Transparent conducting tin-doped indium oxide (ITO) thin films were deposited on Teflon and glass substrates using RF magnetron sputtering technique from an ITO ceramic target. The substrates were loaded on a cylindrical drum maintained at a temperature of 15 ± 2°C and rotated at a constant rate of 6 rpm. At the optimal deposition condition, the ITO thin films with maximum transmission of 93% and a minimum sheet resistance of 10Ω/∠ was achieved.

Citation Download Citation

M. S. Vinodh, Sangeneni Mohan, P. Subaskar, - Rathnakar, H. Bhojraj, and H. Narayanamurthy "Indium tin oxide coatings on flexible and rigid substrates for application in smart windows", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); https://doi.org/10.1117/12.514907

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