Translator Disclaimer
14 October 2003 Indium tin oxide coatings on flexible and rigid substrates for application in smart windows
Author Affiliations +
Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514907
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India
Abstract
Transparent conducting tin-doped indium oxide (ITO) thin films were deposited on Teflon and glass substrates using RF magnetron sputtering technique from an ITO ceramic target. The substrates were loaded on a cylindrical drum maintained at a temperature of 15 ± 2°C and rotated at a constant rate of 6 rpm. At the optimal deposition condition, the ITO thin films with maximum transmission of 93% and a minimum sheet resistance of 10Ω/∠ was achieved.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. S. Vinodh, Sangeneni Mohan, P. Subaskar, - Rathnakar, H. Bhojraj, and H. Narayanamurthy "Indium tin oxide coatings on flexible and rigid substrates for application in smart windows", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514907; https://doi.org/10.1117/12.514907
PROCEEDINGS
8 PAGES


SHARE
Advertisement
Advertisement
Back to Top