14 October 2003 Microfabricated components for miniaturized chemical analysis systems
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Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514726
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India
Abstract
The roles of microfabricated components for miniaturized chemical analysis systems are reviewed and the fundamental advantages of these components are illustrated in typical analysis and separation systems, including mass spectrometry, electroanalytical chemistry, capillary electrophoresis, and chromatography. In each instance the scaling laws that affect the resolution of the miniaturized instrument are supported by key enabling micromachined components. Micromachined components are also enabling elements for system integration and for coupling multiple techniques together in parallel or cascade.
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Robert B. Darling, Robert B. Darling, Tai-Chang Chen, Tai-Chang Chen, Adi A. Scheidemann, Adi A. Scheidemann, Paul Yager, Paul Yager, Kunchinadka Narayana Hari Bhat, Kunchinadka Narayana Hari Bhat, "Microfabricated components for miniaturized chemical analysis systems", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514726; https://doi.org/10.1117/12.514726
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