14 October 2003 Silicon-on-insulator (SOI) wafer fabrication for MEMS applications
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Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514719
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India
Abstract
In this paper, it is shown that Silicon-On-Insulator (SOI) wafers with good surface finish and thickness control can be realized using Silicon Fusion Bonding along with an optimized ethylenediamine-pyrocatechol-water (EDP) etching approach. Single crystal diaphragms of 11 μm thickness have been fabricated using these SOI wafers. These diaphragms were tested and found to withstand N2 gas pressures in excess of 260 psi without rupturing.
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Bhimanadhuni R. KotiReddy, Bhimanadhuni R. KotiReddy, Parimi Ramaseshagiri Rao, Parimi Ramaseshagiri Rao, Amitava DasGupta, Amitava DasGupta, Kunchinadka Narayana Hari Bhat, Kunchinadka Narayana Hari Bhat, } "Silicon-on-insulator (SOI) wafer fabrication for MEMS applications", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514719; https://doi.org/10.1117/12.514719
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