Smart chip with selective micro-probes on Si(111) IC chips for detecting nerve potential

Makoto Ishida; Takeshi Kawano; Hidekuni Takao; Kazuaki Sawada

doi:10.1117/12.514765

14 October 2003 Smart chip with selective micro-probes on Si(111) IC chips for detecting nerve potential

Makoto Ishida, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada

Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514765
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India

Abstract

A large number of single crystal Si micro-probes on Si(111) were fabricated selectively using VLS (Vapor-Liquid-Solid) growth method after IC process. The Si probes can be grown with a high aspect ratio more than a few hundreds. A diameter of the probes can be controlled from sub-micron to a few hundred microns. The Si probe position on the chip is also controlled and the chip with IC circuits can work even after the Si probe growth. Conductivity of the Si probes was controlled by using phosphorous diffusion, resulting in a resistivity of 10^-2 Ω•cm from 10⁴ Ω•cm for a diffusion temperature of 1100°C. In in-vivo studies, penetrating micro-probe array of low impedance such as the VLS growth Si probes has been desired, therefore electrical and mechanical properties were studied detected successfully.

Citation Download Citation

Makoto Ishida, Takeshi Kawano, Hidekuni Takao, and Kazuaki Sawada "Smart chip with selective micro-probes on Si(111) IC chips for detecting nerve potential", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); https://doi.org/10.1117/12.514765

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available