14 October 2003 Uncooled IR sensor based on MEMS technology
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Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514904
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India
In this paper we present a modified design based on thermal characterization of the membrane of microbolometer based infrared detectors. Theoretical calculations show that the thermal conductance should be of the order of 10-5 W/K for 100 μm x 100 μm membrane size with the hinges of length 2 μm whereas our experimental results show that it is of the order of 10-7 W/K. These results are explained on the basis of reduced value of the thermal conductivity of thin films compared to their bulk value. A model has been presented to explain the results.
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Deepika Khilnaney, Deepika Khilnaney, Alok Jain, Alok Jain, C. R. Jalwania, C. R. Jalwania, Vinoy K. Jain, Vinoy K. Jain, "Uncooled IR sensor based on MEMS technology", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); doi: 10.1117/12.514904; https://doi.org/10.1117/12.514904

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