PROCEEDINGS VOLUME 5063
FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION | 21-24 JUNE 2003
Fourth International Symposium on Laser Precision Microfabrication
Editor Affiliations +
FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION
21-24 June 2003
Munich, Germany
Plenary Session: Overview on Laser Precision Microfabrication
Simone Amorosi, Thomas C. Sidler, Rene Paul Salathe, Hans Peter Schwob, Joachim Hertzberg
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540460
Dieter Baeuerle, Gerard Wysocki, Lars Landstroem, Johannes Klimstein, Klaus Piglmayer, Johannes Heitz
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541052
Richard F. Haglund Jr., Daniel M. Bubb, David R. Ermer, G. K. Hubler, Eric J. Houser, James S. Horwitz, Borislav L. Ivanov, Michael R. Papantonakis, Bradley R. Ringeisen, et al.
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541054
Naohisa Matsushita
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540475
Thin-Film Processing
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540496
Satoru Nishio, Chihiro Kanezawa, Hiroshi Fukumura
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540530
Hyunkyu Lim, Dongsik Kim
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540597
Sungho Jeong, Seongil Han, Jayaraman Senthil Selvan
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541056
J. H. Kim, Kyoung-cheol Lee, Cheon Lee
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541058
Dae-Jin Kim, Hyun-Jung Kim, Je-Kil Ryu, Sung-Sik Pak
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540598
Kyoung-Cheol Lee, Cheon Lee
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540603
Tatsuya Shinozaki, Toshihiko Ooie, Tetsuo Yano
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540605
Dong-Yong Kim, Kyoung-cheol Lee, Cheon Lee
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541064
Fundamentals of fs-laser Processing
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540606
Detlef Breitling, Klaus-Peter Mueller, Andreas Ruf, Peter Berger, Friedrich Dausinger
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540608
Xiaoxi Li, Tianqin Jia, Donghai Feng, Zhizhan Xu
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540643
Machining of Silica and Glass
David Ashkenasi, Hans-Juergen Hoffmann, Gerhard J. Mueller
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540695
Masashi Masuda, Koji Sugioka, Ya Cheng, Masako Kawachi, Kazuhiko Shihoyama, Koichi Toyoda, Katsumi Midorikawa
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541066
Ya Cheng, Koji Sugioka, Masashi Masuda, Kazuhiko Shihoyama, Koichi Toyoda, Katsumi Midorikawa
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540697
Arzu Ozkan, Leonard R. Migliore, Corey M. Dunsky, Michael W. Phaneuf
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540701
Malte Schulz-Ruthenberg, Juergen Ihlemann, Gerd Marowsky, Amir H. Nejadmalayeri, Mi Li Ng, Jianzhao Li, Peter R. Herman
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541070
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541072
Masanori Shojiya, Hirotaka Koyo, Keiji Tsunetomo
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540722
Y. Iga, Wataru Watanabe, T. Ishizuka, Yan Li, Junji Nishii, Kazuyoshi Itoh
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541076
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540725
Vadim P. Veiko, Q. K. Kieu, P. K. Skiba
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540728
Manufacturing of Microsystems
Horst Exner, Peter Regenfuss, Lars Hartwig, Sascha Kloetzer, Robby Ebert
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540730
Andrew S. Holmes, Mark E. Heaton, Guodong Hong, Keith R. Pullen, Phil T. Rumsby
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540733
Alexander Bayer, Arnold Gillner, Peter Groche, Ruediger Erhardt
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541079
Michael Schmidt, Gerd Esser
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540742
Jens P. Wulfsberg, Sven-Eric Hilpert, Andreas Ostendorf, Christian J. Kulik, Thorsten Temme, Katja Samm
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541442
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540461
Robby Ebert, Peter Regenfuss, Sascha Kloetzer, Lars Hartwig, Horst Exner
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540466
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540471
Precise Structuring
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540486
Stefan Beyer, Vivi Tornari, Daniel Gornicki
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540498
Michael Weikert, Christian Foehl, Friedrich Dausinger, Tobias Abeln
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541081
Johan Bosman, Henk Kettelarij, Corne J.G.M. de Kok
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540504
Elke A. Bremus-Koebberling, Arnold Gillner
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541084
Yuri Kaganovskii, Irena Antonov, David Ianetz, Michael Rosenbluh, Andrey A. Lipovskii
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541085
Andreas Stephen, Simeon Metev, Frank Vollertsen
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540525
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540527
Yasuhiro Hidaka, Takashi Miyoshi, Yasuhiro Takaya, Tetsuo Sasaki, Kenji Shirai
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540508
N. Mansour, K. Jamshidi Ghaleh
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540528
Won-Seok Chang, Bosung Shin, Jae-gu Kim, Kyung-Hyun Whang
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540534
Wei-Jie Wang, M. F. Tan, Ming Hui Hong, Tow Chong Chong
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540537
Special Session on EUV Technology
Kai M. Gaebel, Juergen Kleinschmidt, Guido Schriever, Uwe Stamm, Rainer Lebert, Max Christian Schuermann
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541147
Andre Egbert, Boris Tkachenko, Andreas Ostendorf, Stefan Becker, Boris N. Chichkov
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540546
Akira Endo
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540548
Georg Soumagne, Tamotsu Abe, Kenichi Ikeda, Hiroshi Komori, Hiroshi Someya, Takashi Suganuma, Kazuhisa Nakajima, Akira Endo
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541149
Masato Watanabe, Tetsu Kasao, Mitsuo Okamoto, In Ho Song, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540550
Micro-Welding and Melting
Keisuke Uenishi, Masaya Takatsugu, Kojiro F. Kobayashi
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540551
Nobuyuki Abe, Yoshinori Funada, Masahiro Ishide
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540554
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541153
Isamu Miyamoto, Seo-Jeong Park, Toshihiko Ooie
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541155
Kilian Klages, Arnold Gillner, Alexander M. Olowinsky, Sandra Fronczek, Armin Studt
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540557
Anthony P. Hoult
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540601
Ihor Mys, Manfred Geiger
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540602
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540464
Bukuk Oh, Dongsik Kim, Wonseok Jang, Bosung Shin
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540469
Doukei Nagayasu, Jing-bo Wang
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540488
Toshihiko Ooie, Shinsuke Asada, Isamu Miyamoto
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540497
Applications of fs-laser Maching
Yoshiro Ito, Kazunori Kuroi, Kazuhide Hayakawa
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540501
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540505
Christian Foehl, Friedrich Dausinger
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540506
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540515
Thomas Hoeche, Tino Petsch, David Ruthe, Klaus-Peter Zimmer, Frank Syrowatka, Frank Heyroth
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541156
Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540518
Y. Iwai, T. Arai, T. Honda, Ryuzo Tanaka, T. Takaoka
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540522
Kenji Katayama, Hideaki Yonekubo, Tsuguo Sawada
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540531
Ryuzo Tanaka, T. Takaoka, H. Mizukami, T. Arai, Y. Iwai
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540533
Egidijus Vanagas, Dmitry Tuzhilin, Michail Zinkou, Alexander Sedunov, Nikolai Vasiliev, Igor Kudryashov, Vladimir Kononov, Shozi Suruga
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540538
Mikio Yamanoi, Satoshi Wada, Masahiro Anzai, Hitoshi Ohmori, Akitake Makinouchi
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540604
Precision Marking
Thomas H. Kuntze, Michael Panzner, Udo Klotzbach, Eckhard Beyer
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541162
Thierry Lamarque, Ralf Nicolaus, Brigitte Loiseaux, Jean-Pierre Huignard, Gintas Slekys, Jingjun Xu
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540607
Drilling and Microcutting
Roswitha Giedl, H.-J. Helml, F. X. Wagner, Michael J. Wild
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540609
Aart Schoonderbeek, Cornelis A. Biesheuvel, Ramon M. Hofstra, Klaus-Jochen Boller, Johan Meijer
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540741
Alexander Binder, David Ashkenasi, Norbert Mueller, Thomas Riesbeck, Hans Joachim Eichler
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540748
Katsuichi Ukita, Yasuhiro Mizutnai, Daisuke Yokohagi, Koki Ichihashi, Hidehiko Karasaki
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541163
Keiji Ebata, Keiji Fuse, Takayuki Hirai, Kenichi Kurisu
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541164
Hiroshi Asano, Jippei Suzuki, Hiroshi Kawakami, Hiroshi Eguchi
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541165
Silvio Georgi
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541166
Masaki Seguchi, Shuichi Fujikawa, Tetsuo Kojima, Keisuke Furuta, Yushi Takenaka, Jun-ichi Nishimae
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540750
Jens Willach, Ernst Wolfgang Kreutz, Jan Michel, Markus Niessen, Wolfgang Schulz, Reinhart Poprawe
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540753
Laser Nano-Machining
J. M. Lee, S. H. Cho, T. H. Kim, Jin-Goo Park, Ahmed A. Busnaina
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541167
Jan-Hendrik Klein-Wiele, Peter Simon
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540757
Weijie Wang, Ming Hui Hong, Dongjiang Wu, Yeow Whatt Goh, Y. Lin, P. Luo, Boris S. Luk'yanchuk, Yongfeng Lu, Tow Chong Chong
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540758
Manufacturing of Waveguides
Michael A. Fokine
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.541170
Isabelle F. Riant
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540760
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540762
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540763
Carsten Wochnowski, Simeon Metev, Krassimira Meteva, Frank Vollertsen
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540767
Arnaud Zoubir, Martin C. Richardson, Clara Rivero, Cedric Lopez, Kathleen A. Richardson, Nicolas Ho, Real Vallee
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540876
Hiroaki Nishiyama, Tomokazu Sano, Etsuji Ohmura, Isamu Miyamoto, Shin-ichi Matsumoto, Mitsunori Saito, Kenji Kintaka, Junji Nishii
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540896
Dicing and Processing
Tom M. Corboline, Edward C. Rea Jr., Corey M. Dunsky
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540931
Ochelio D. Sibailly, Frank Ruediger Wagner, Laetitia Mayor, Bernold Richerzhagen
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540932
Leonard R. Migliore, Arzu Ozkan
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540743
Y. Iwai, T. Mizuno, T. Arai, T. Honda, Ryuzo Tanaka, T. Takaoka
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540744
Laser Systems and Optics
Kazufumi Nomura, Etsuji Ohmura, Alexander Horn, Isamu Miyamoto
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540755
Etsuji Ohmura, Kazufumi Nomura, Isamu Miyamoto
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540933
Zhaogu Cheng, Rufeng Li
Proceedings Volume Fourth International Symposium on Laser Precision Microfabrication, (2003) https://doi.org/10.1117/12.540934
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