Experimental assessment of machining accuracy obtainable by femtosecond-laser surface structuring

Thomas Hoeche; Tino Petsch; David Ruthe; Klaus-Peter Zimmer; Frank Syrowatka; Frank Heyroth

doi:10.1117/12.541156

18 November 2003 Experimental assessment of machining accuracy obtainable by femtosecond-laser surface structuring

Thomas Hoeche, Tino Petsch, David Ruthe, Klaus-Peter Zimmer, Frank Syrowatka, Frank Heyroth

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.541156
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

Surface replica films taken from fs-laser machined silicon wafers coated with a 20 nm thick layer of nickel are analyzed in an environmental scanning electron microscope. Electron-probe microanalysis on the replica film is used to assess the spatial distribution and elemental composition of debris.

Citation Download Citation

Thomas Hoeche, Tino Petsch, David Ruthe, Klaus-Peter Zimmer, Frank Syrowatka, and Frank Heyroth "Experimental assessment of machining accuracy obtainable by femtosecond-laser surface structuring", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.541156

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