Fabrication of three-dimensional microstructures by stacking laser-direct-write layers

Sungho Jeong; Seongil Han; Jayaraman Senthil Selvan

doi:10.1117/12.541056

18 November 2003 Fabrication of three-dimensional microstructures by stacking laser-direct-write layers

Sungho Jeong, Seongil Han, Jayaraman Senthil Selvan

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.541056
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

Laser-induced chemical vapor deposition is applied to fabricate three-dimensional microstructures that have cross-sectional profiles other than simple combination of deposited fibers. To fabricate microstructures other than combined wire-frames, a thin layer of deposit in desired patterns is first written using laser-direct-write technique and on top of this layer a second layer is deposited to provide the third dimension normal to the surface. By depositing many layers, a full three-dimensional microstructure is fabricated. Optimum deposition conditions for direct writing of initial and subsequent layers with good surface quality and profile uniformity are determined. Using an argon ion laser and ethylene as the light source and reaction gas, respectively, fabrication of three-dimensional carbon microstructures with the proposed method is demonstrated.

Citation Download Citation

Sungho Jeong, Seongil Han, and Jayaraman Senthil Selvan "Fabrication of three-dimensional microstructures by stacking laser-direct-write layers", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.541056

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