18 November 2003 Glass processing using microsecond, nanosecond and femtosecond pulsed lasers
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Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540701
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany
Abstract
Laser processing of glass components is of significant commercial interest for the optoelectronics and telecommunications industries. In this paper, we present laser processing techniques using microsecond, nanosecond, and femtosecond lasers for machining of glass. Surface structures, mainly groove geometries, are generated with a diode-pumped solid-state nanosecond pulsed UV laser operating at 266 nm, a Q-switched CO2 laser operating at 9.25 μm, a CO2 laser operating at 10.6 μm and the femtosecond pulsed laser operating at 800 nm. Grooves are cross-sectioned and viewed with a focused ion beam (FIB) microscope. The resultant material structures are examined with respect to the differences in time scale and the appropriateness of each laser type for particular processes.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arzu Ozkan, Arzu Ozkan, Leonard R. Migliore, Leonard R. Migliore, Corey M. Dunsky, Corey M. Dunsky, Michael W. Phaneuf, Michael W. Phaneuf, } "Glass processing using microsecond, nanosecond and femtosecond pulsed lasers", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540701; https://doi.org/10.1117/12.540701
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