18 November 2003 High precision laser processing of sensitive materials by Microjet
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Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540932
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany
Abstract
Material laser cutting is well known and widely used in industrial processes, including micro fabrication. An increasing number of applications require nevertheless a superior machining quality than can be achieved using this method. A possibility to increase the cut quality is to opt for the water-jet guided laser technology. In this technique the laser is conducted to the work piece by total internal reflection in a thin stable water-jet, comparable to the core of an optical fiber. The water jet guided laser technique was developed originally in order to reduce the heat damaged zone near the cut, but in fact many other advantages were observed due to the usage of a water-jet instead of an assist gas stream applied in conventional laser cutting. In brief, the advantages are three-fold: the absence of divergence due to light guiding, the efficient melt expulsion, and optimum work piece cooling. In this presentation we will give an overview on several industrial applications of the water-jet guided laser technique. These applications range from the cutting of CBN or ferrite cores to the dicing of thin wafers and the manufacturing of stencils, each illustrates the important impact of the water-jet usage.
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Ochelio D. Sibailly, Frank Ruediger Wagner, Laetitia Mayor, Bernold Richerzhagen, "High precision laser processing of sensitive materials by Microjet", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540932; https://doi.org/10.1117/12.540932
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