Laser amorphization of glass-ceramics (LAGS) laws and new possibility to form a number of micro-optical components

Vadim P. Veiko; Q. K. Kieu; P. K. Skiba

doi:10.1117/12.540728

18 November 2003 Laser amorphization of glass-ceramics (LAGS) laws and new possibility to form a number of micro-optical components

Vadim P. Veiko, Q. K. Kieu, P. K. Skiba

Author Affiliations +

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540728
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

Laser amorphization of glass-ceramics (LAGC) is investigated by optical pyrometry and video recording. Due to this new knowledge, the mechanism of local LAGC is made clear as a phenomenon leaded by thermal kinetic. The required power density and temporal range of CO₂-laser irrdiation for amorphization of a typical glass-ceramic (GC) α-TiO₂ • 2MgO • 2Al₂O₃ • 5SiO₂ is defined. It is demonstrated that a wide range of miniature optical components such as lenses, lenslet arrays, waveguides, geodesic (plane) lenses, etc... can be fabricated by LAGC.

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Vadim P. Veiko, Q. K. Kieu, and P. K. Skiba "Laser amorphization of glass-ceramics (LAGS) laws and new possibility to form a number of micro-optical components", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540728

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