18 November 2003 Laser microprocessing: facts and trends
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Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540742
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany
Abstract
Micro technology is an application field, in which laser-based processes show a particularly high growth potential. New developments within the range of laser sources promote the laser application likewise, as the multiplicity of today already successfully realized applications. These encourage users ever more to focus on the tool called laser. With this contribution one tries to give an overview over developments and trends in the most important branches of laser beam micromachining. In detail semiconductor manufacturing, interconnect and micro mechanics are addressed. The contribution neither raises a claim on completeness, nor is to be given an absolutely measurable evaluation of the innovation value of interesting new developments. The goal of this contribution is to be a basis for a fruitful discussion between laser researchers, developers, users and manufacturers by supplying with information about activities in the field of micro technology.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael Schmidt, Michael Schmidt, Gerd Esser, Gerd Esser, } "Laser microprocessing: facts and trends", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540742; https://doi.org/10.1117/12.540742
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