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18 November 2003 Laser profiling of 3D microturbine blades
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Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003)
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany
We have used KrF excimer laser ablation in the fabrication of a novel MEMS power conversion device based on an axial-flow turbine with an integral axial-flux electromagnetic generator. The device has a sandwich structure, comprising a pair of silicon stators either side of an SU8 polymer rotor. The curved turbine rotor blades were fabricated by projection ablation of SU8 parts performed by conventional UV lithography. A variable aperture mask, implemented by stepping a moving aperture in front of a fixed one, was used to achieve the desired spatial variation in the ablated depth. An automatic process was set up on a commercial laser workstation, with the laser firing and mask motion being controlled by computer. High quality SU8 rotor parts with diameters of 13 mm and depths of 1 mm were produced at a fluence of 0.7 J/cm2, corresponding to a material removal rate of approximately 0.3 μm per pulse. A similar approach was used to form SU8 guide vane inserts for the stators.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrew S. Holmes, Mark E. Heaton, Guodong Hong, Keith R. Pullen, and Phil T. Rumsby "Laser profiling of 3D microturbine blades", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003);


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