Microdrilling, -scribing and cutting with high-quality and high-power ns-Nd:YAG systems

Alexander Binder; David Ashkenasi; Norbert Mueller; Thomas Riesbeck; Hans Joachim Eichler

doi:10.1117/12.540748

18 November 2003 Microdrilling, -scribing and cutting with high-quality and high-power ns-Nd:YAG-systems

Alexander Binder, David Ashkenasi, Norbert Mueller, Thomas Riesbeck, Hans Joachim Eichler

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540748
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

To meet the industry's demand for reducing machine cycle lengths concerning laser-drilling a Nd:YAG Master-Oscillator Power-Amplifier (MOPA)-system was developed at the LMTB-laboratories that emits high-power peak-pulses at excellent beam-quality. Presently, the output power of the oscillator (10W@1064nm) with a beam-quality of M² = 1.3 is amplified to 95W@1064 nm with M²=2.3 and a single pulse energy up to 500 mJ. The pulse duration can be varied between 26 and 230 ns. On account of the excellent beam quality, frequency conversion resulted in 49W@532nm and 4.8@266nm. The MOPA-System is used for laser micro drilling experiments into metals and ceramics where the influence of the beam quality on the geometrical shape of the hole is investigated and compared with applications conducted with similar laser systems. Additionally means in optimizing the drilling process such as burr-minimizing and melt-reduction were introduced. Furthermore, experiments using tapered drilling technique are undertaken. A maximum aspect ratio of 1:200 in stainless steel was obtained.

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Alexander Binder, David Ashkenasi, Norbert Mueller, Thomas Riesbeck, and Hans Joachim Eichler "Microdrilling, -scribing and cutting with high-quality and high-power ns-Nd:YAG-systems", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540748

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KEYWORDS

Laser drilling

Nd:YAG lasers

Laser systems engineering

Oscillators

Metals

Optical amplifiers

Sapphire

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