New methods to control quality and precision of micro-machining with femtosecond lasers

Ronan Le Harzic; Nicolas Sanner; Nicolas Huot; C. Donnet; Eric Audouard; Pierre Laporte

doi:10.1117/12.540515

18 November 2003 New methods to control quality and precision of micro-machining with femtosecond lasers

Ronan Le Harzic, Nicolas Sanner, Nicolas Huot, C. Donnet, Eric Audouard, Pierre Laporte

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540515
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

Due to the rapid development of ultrashort lasers, quality of the machining is of prime interest for several applications. For instance deep marking of various materials. In this case, the depth can be controlled, knowing the ablation rate for the corresponding material. The evolution of ablation rates of Al, Cu and Ni are given in relation to the energy density. In metals the effect of thermal diffusion has to be taken into account to control collateral effects and especially the heat affected zone.

Citation Download Citation

Ronan Le Harzic, Nicolas Sanner, Nicolas Huot, C. Donnet, Eric Audouard, and Pierre Laporte "New methods to control quality and precision of micro-machining with femtosecond lasers", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540515

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