14 April 2003 Model of control of glow discharge electron gun current for microelectronics production applications
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Proceedings Volume 5065, Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics; (2003) https://doi.org/10.1117/12.502174
Event: Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics, 2002, Kiev, Ukraine
Abstract
The problems of simulation of discharge current control and its gas-dynamic stabilization for technological glow discharge electron guns with a cold cathode are considered in a paper. Such guns are successfully operated in soft vacuum and can be used in modern microelectronic technologies for providing of thermal operations with using different technological gases including active ones. The results of theoretical and experimental investigation of automatic control system of current of electron gun which were used for deposition of coatings in reactive gas medium are presented in article. Time of regulation for considered system did not exceed 400 ms. Is proved, that the automatic control of a current of a glow discharge electron gun by pressure variation its volume is effective on all operation range of pressure, and the minimum time of a current regulation can be tens -- hundred of ms, and this fact is allow to use in the majority of technological operations for microelectronic production.
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S. V. Denbnovetsky, V. I. Melnyk, I. V. Melnyk, B. A. Tugay, "Model of control of glow discharge electron gun current for microelectronics production applications", Proc. SPIE 5065, Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics, (14 April 2003); doi: 10.1117/12.502174; https://doi.org/10.1117/12.502174
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