14 April 2003 SiOx (Fe) thin films as material for uncooled microbolometer
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Proceedings Volume 5065, Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics; (2003) https://doi.org/10.1117/12.502296
Event: Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics, 2002, Kiev, Ukraine
Abstract
Composite metal-dielectric SiOx -Fe- films with concentration of metal varied on thickness in dielectric matrix SiOx are investigated. The reflectance and transmittance of the samples at normal incidence were measured in the 2 - 12 microns wavelength range. In the wavelength range of 2 - 8,5 microns absorption of the films is about 90%, in more long-wavelength area 8,5 - 12 microns absorption is equal 70 - 80%. The optical properties of these gradient layers are simulated, and the results of simulation are compared with experimental data. In a range of temperatures 283 - 390 K thermosensitive properties of SiOx -Fe- films are investigated and values of temperature coefficient of resistance is determined. These coatings can be used as a sensitive layer of uncooled microbolometers.
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K. Michailovskaya, K. Michailovskaya, Ivan Z. Indutnyy, Ivan Z. Indutnyy, Peter E. Shepeliavy, Peter E. Shepeliavy, } "SiOx (Fe) thin films as material for uncooled microbolometer", Proc. SPIE 5065, Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics, (14 April 2003); doi: 10.1117/12.502296; https://doi.org/10.1117/12.502296
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