A four-bit digital MEMS phase shifter

Jian Zhu; Bailing Zhou; Jinting Lin; Yuanwei Yu; Le Lu

doi:10.1117/12.498844

24 April 2003 A 4-bit digital MEMS phase shifter

Jian Zhu, Bailing Zhou, Jinting Lin, Yuanwei Yu, Le Lu

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.498844
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

A 4-bit digital MEMS phase shifter, based on RF MEMS series switches and switched-line design, is presented. The phase shifter is fabricated on a 360 μm-thick silicon substrate, and the chip size is smaller than 5×8 mm ². The simulation performance of 16 phase states shows that at X-band the worst insertion phase deviation is 8 degree from the desired value, the insertion loss is less than -2.0dB and the VSWR is less than 1.8.

Citation Download Citation

Jian Zhu, Bailing Zhou, Jinting Lin, Yuanwei Yu, and Le Lu "A 4-bit digital MEMS phase shifter", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.498844

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