24 April 2003 A 4-bit digital MEMS phase shifter
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A 4-bit digital MEMS phase shifter, based on RF MEMS series switches and switched-line design, is presented. The phase shifter is fabricated on a 360 μm-thick silicon substrate, and the chip size is smaller than 5×8 mm 2. The simulation performance of 16 phase states shows that at X-band the worst insertion phase deviation is 8 degree from the desired value, the insertion loss is less than -2.0dB and the VSWR is less than 1.8.
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Jian Zhu, Jian Zhu, Bailing Zhou, Bailing Zhou, Jinting Lin, Jinting Lin, Yuanwei Yu, Yuanwei Yu, Le Lu, Le Lu, } "A 4-bit digital MEMS phase shifter", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.498844; https://doi.org/10.1117/12.498844


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