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24 April 2003 Design fabrication and test of micromachined-silicon capacitive gas sensors with integrated readout
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Abstract
In 1985 Gerd Binnig and Calvin F. Quate from Stanford and Christopher Gerber from IBM (Zurich) designed the Atomic Force Microscope (AFM), since then a big interest arose around one of its main components; micromachined cantilevers. During all these years, authors have employed these tiny devices to sense multiple physical and chemical parameters through diverse transduction principles. Micromachined cantilevers offer many different transduction mechanisms: force sensing, bimetallic effect, mass loading, medium viscoelasticity, thermogravimetry, stress sensing, and more. Along with all these transduction mechanisms, a great variety of detection methods can be employed with cantilever-based sensors as for example: optical detection, resonance frequency measurement, piezoelectric integrated resistors, etc. The design and fabrication process of a micromachined Silicon capacitive gas sensor are described in this paper. Design and testing of the interface circuitry are also shown with preliminary results.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jorge Amirola, Angel Rodiguez, and Luis Castaner "Design fabrication and test of micromachined-silicon capacitive gas sensors with integrated readout", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.498660
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