24 April 2003 Fabrication of a highly efficient optical modulator based on silicon-on-insulator
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Abstract
Silicon-on-insulator (SOI) technology offers tremendous potential for the integration of optoelectronic functions on a silicon substrate. In this research, we report on the fabrication process of a Mach-Zehnder interferometer on an SOI with 0.5μm wide waveguides in a Si layer of the order of ~1μm thick. These small dimensions increase the speed of these devices. However, with these small dimensions several fabrication difficulties such as alignment and thickness accuracy are present.
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Raghied M. H. Atta, Raghied M. H. Atta, Graham J. Ensell, Graham J. Ensell, Alan G. R. Evans, Alan G. R. Evans, Jason C. E. Png, Jason C. E. Png, Graham T. Reed, Graham T. Reed, } "Fabrication of a highly efficient optical modulator based on silicon-on-insulator", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.498967; https://doi.org/10.1117/12.498967
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