24 April 2003 Fabrication of bead-size sorting chip for chemical array sensor
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Abstract
Combinations of micromachined platforms and chemically sensitive micro-beads have been demonstrated for use as multi-analyte chemical and biological agent detectors. Two critical requirements for bead-based chemical detection platforms are bead retention and assembly. Separate “cover layers” have been used in the past for retention, but this constrains fluid flow through the device, and may require the use of precision spacers. In addition, since chemical sensing molecules within the beads can be quite sensitive exposure to high temperatures or harsh chemicals used in micromachining must be avoided after beads are placed in the platform. Here we present a new device whose fabrication is completed before placing the beads, and that provides both bead confinement and a means for self-assembly of arrays. Simple micromachined flexible “fingers” are used for all functions. The micromachined fingers are designed to bend out of the way as a bead is placed into a micromachined storage well, but then snap back after the bead is fully inserted into the well. We have also demonstrated that by designing different sized openings over each well it is possible to construct self-assembling bead arrays.
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Byung Hwa Park, Byung Hwa Park, Yoon Seok Park, Yoon Seok Park, Young-Soo Sohn, Young-Soo Sohn, Dean Neikirk, Dean Neikirk, } "Fabrication of bead-size sorting chip for chemical array sensor", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.499025; https://doi.org/10.1117/12.499025
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