24 April 2003 Finline technology for millimeter-wave MEMS
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Abstract
Recent development of finline 35 GHz MEM modules like Gunn oscillator, PIN switch, and filters at Nanyang Technological University will be discussed. The design tools and measurement equipments like Advanced Design System (ADS), High Frequency Structure Simulator (HFSS) and Vector Network Analyzer (VNA) are used extensively throughout the work.
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Jeffrey S. Fu, Jeffrey S. Fu, Jiaoyun Zhou, Jiaoyun Zhou, Yilong Lu, Yilong Lu, Jianguo Ma, Jianguo Ma, Zhongxiang Shen, Zhongxiang Shen, } "Finline technology for millimeter-wave MEMS", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.487702; https://doi.org/10.1117/12.487702
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