MEMS-based transmission lines for microwave applications

Qun Wu; Jiahui Fu; Xuemai Gu; Huajuan Shi; Jongchul Lee

doi:10.1117/12.498706

24 April 2003 MEMS-based transmission lines for microwave applications

Qun Wu, Jiahui Fu, Xuemai Gu, Huajuan Shi, Jongchul Lee

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.498706
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

This paper mainly presents a briefly review for recent progress in MEMS-based transmission lines for use in microwave and millimeterwave range. MEMS-based transmission lines including different transmission line structure such as membrane-supported microstrip line microstrip line, coplanar microshield transmission line, LIGA micromachined planar transmission line, micromachined waveguides and coplanar waveguide are discussed. MEMS-based transmission lines are characterized by low propagation loss, wide operation frequency band, low dispersion and high quality factor, in addition, the fabrication is compatible with traditional processing of integrated circuits (IC’s). The emergence of MEMS-based transmission lines provided a solution for miniaturizing microwave system and monolithic microwave integrated circuits.

Citation Download Citation

Qun Wu, Jiahui Fu, Xuemai Gu, Huajuan Shi, and Jongchul Lee "MEMS-based transmission lines for microwave applications", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.498706

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