24 April 2003 MEMS variable optical attenuator for volume production
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In recent years, the image of the MEMS based fiber-optic industry has been plagued by a wave of product launch delays and cancellations. Long been of great interest to the academic community, MEMS based solutions have suffered from a focus on the MEMS alone and an underestimation of the complexity of productization. What is needed for successful development is the implementation of the system approach in MEMS product development. The essence of this approach lies in developing a thorough understading of all the requirements and constraints at the product level, not just the MEMS level. This will reveal all the intricate design interdependencies and trade-offs between all the different technologies involved, from MEMS to manufacturing, and provide confidence in the development timeline and marketability of the final product. A variable optical attenuator is presented that was designed from the ground up using the system approach which has resulted in the smallest size, lowest cost, market accepted solution.
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Vladimir I. Vaganov, Vladimir I. Vaganov, Sebastiaan R. in 't Hout, Sebastiaan R. in 't Hout, Nickolai Belov, Nickolai Belov, } "MEMS variable optical attenuator for volume production", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.502020; https://doi.org/10.1117/12.502020

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