24 April 2003 Monolithical integration of polymer-based microfluidic structures on application-specific integrated circuits
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In this paper, a concept for a monolithically integrated chemical lab on microchip is presented. It contains an ASIC (Application Specific Integrated Circuit), an interface to the polymer based microfluidic layer and a Pyrex glass cap. The top metal layer of the ASIC is etched off and replaced by a double layer metallization, more suitable to microfluidic and electrophoresis systems. The metallization consists of an approximately 50 nm gold layer and a 10 nm chromium layer, acting as adhesion promoter. A necessary prerequisite is a planarized ASIC topography. SU-8 is used to serve as microfluidic structure because of its excellent aspect ratio. This polymer layer contains reservoirs, channels, mixers and electrokinetic micro pumps. The typical channel cross section is 10μm•10μm. First experimental results on a microfluidic pump, consisting of pairs of interdigitated electrodes on the bottom of the channel and without any moving parts show a flow of up to 50μm per second for low AC-voltages in the range of 5 V for aqueous fluids. The microfluidic system is irreversibly sealed with a 150μm thick Pyrex glass plate bonded to the SU-8-layer, supported by oxygen plasma. Due to capillary forces and surfaces properties of the walls the system is self-priming. The technologies for the fabrication of the microfluidic system and the preparation of the interface between the lab layer and the ASIC are presented.
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Steffen Chemnitz, Steffen Chemnitz, Heiko Schafer, Heiko Schafer, Stephanie Schumacher, Stephanie Schumacher, Volodymyr Koziy, Volodymyr Koziy, Alexander Fischer, Alexander Fischer, Alfred J. Meixner, Alfred J. Meixner, Dietmar Ehrhardt, Dietmar Ehrhardt, Markus Bohm, Markus Bohm, } "Monolithical integration of polymer-based microfluidic structures on application-specific integrated circuits", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.498994; https://doi.org/10.1117/12.498994

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