24 April 2003 Novel three-axis silicon probe with integrated circuit on chip for microsystem components
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Abstract
A three-axis micro probe with wiring of the piezoresistors to Wheatstone bridges on the silicon membrane was currently developed for application in high precision coordinate measuring machines (CMM). The methods and results of the experimental investigation of the main properties of the 3d micro probe are presented. The influence of temperature and light onto the probe performance is described. Finally a brief outlook on the optimization of the threshold sensitivity is given.
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Vladimir Nesterov, Vladimir Nesterov, Petcharin Pornnoppadol, Petcharin Pornnoppadol, Uwe Brand, Uwe Brand, Ralph Wilke, Ralph Wilke, M. Schmidt, M. Schmidt, Stephanus Buettgenbach, Stephanus Buettgenbach, } "Novel three-axis silicon probe with integrated circuit on chip for microsystem components", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.499264; https://doi.org/10.1117/12.499264
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