Optical MEMS devices for telecom systems

Flavio Pardo; Vladimir A. Aksyuk; Susanne Arney; H. Bair; Nagesh R. Basavanhally; David J. Bishop; Gregory R. Bogart; Cristian A. Bolle; J. E. Bower; Dustin Carr; H. B. Chan; Raymond A. Cirelli; E. Ferry; Robert E. Frahm; Arman Gasparyan; John V. Gates; C. Randy Giles; L. Gomez; Suresh Goyal; Dennis S. Greywall; Martin Haueis; R. C. Keller; Jungsang Kim; Fred P. Klemens; Paul R. Kolodner; Avi Kornblit; T. Kroupenkine; Warren Y.-C. Lai; Victor Lifton; Jian Liu; Yee L. Low; William M. Mansfield; Dan Marom; John F. Miner; David T. Neilson; Mark A. Paczkowski; C. S. Pai; A. G. Ramirez; David A. Ramsey; S. Rogers; Roland Ryf; Ronald E. Scotti; Herbert R. Shea; M. E. Simon; H. T. Soh; Hong Tang; J. A. Taylor; K. Teffeau; Joseph Vuillemin; J. Weld

doi:10.1117/12.499075

24 April 2003 Optical MEMS devices for telecom systems

Flavio Pardo, Vladimir A. Aksyuk, Susanne Arney, H. Bair, Nagesh R. Basavanhally, David J. Bishop, Gregory R. Bogart, Cristian A. Bolle, J. E. Bower, Dustin Carr, H. B. Chan, Raymond A. Cirelli, E. Ferry, Robert E. Frahm, Arman Gasparyan, John V. Gates, C. Randy Giles, L. Gomez, Suresh Goyal, Dennis S. Greywall, Martin Haueis, R. C. Keller, Jungsang Kim, Fred P. Klemens, Paul R. Kolodner, Avi Kornblit, T. Kroupenkine, Warren Y.-C. Lai, Victor Lifton, Jian Liu, Yee L. Low, William M. Mansfield, Dan Marom, John F. Miner, David T. Neilson, Mark A. Paczkowski, C. S. Pai, A. G. Ramirez, David A. Ramsey, S. Rogers, Roland Ryf, Ronald E. Scotti, Herbert R. Shea, M. E. Simon, H. T. Soh, Hong Tang, J. A. Taylor, K. Teffeau, Joseph Vuillemin, J. Weld

Author Affiliations +

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.499075
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

As telecom networks increase in complexity there is a need for systems capable of manage numerous optical signals. Many of the channel-manipulation functions can be done more effectively in the optical domain. MEMS devices are especially well suited for this functions since they can offer large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of Optical Cross Connects, WDM spectrum equalizers and Optical Add-Drop multiplexors based on different fabrication technologies such as polySi surface micromachining, single crystal SOI and combination of both. We show specific examples of these devices, discussing design trade-offs, fabrication requirements and optical performance in each case.

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Flavio Pardo, Vladimir A. Aksyuk, Susanne Arney, H. Bair, Nagesh R. Basavanhally, David J. Bishop, Gregory R. Bogart, Cristian A. Bolle, J. E. Bower, Dustin Carr, H. B. Chan, Raymond A. Cirelli, E. Ferry, Robert E. Frahm, Arman Gasparyan, John V. Gates, C. Randy Giles, L. Gomez, Suresh Goyal, Dennis S. Greywall, Martin Haueis, R. C. Keller, Jungsang Kim, Fred P. Klemens, Paul R. Kolodner, Avi Kornblit, T. Kroupenkine, Warren Y.-C. Lai, Victor Lifton, Jian Liu, Yee L. Low, William M. Mansfield, Dan Marom, John F. Miner, David T. Neilson, Mark A. Paczkowski, C. S. Pai, A. G. Ramirez, David A. Ramsey, S. Rogers, Roland Ryf, Ronald E. Scotti, Herbert R. Shea, M. E. Simon, H. T. Soh, Hong Tang, J. A. Taylor, K. Teffeau, Joseph Vuillemin, and J. Weld "Optical MEMS devices for telecom systems", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.499075

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