24 April 2003 Stereolithography of lead zirconate titanate ceramics for MEMS applications
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In this study, stereolithography of PZT films or composites has been successfully carried out. With regard to the PZT suspensions formulation, the process was modified to allow the deposition of films with thickness ranging between 8 to 40 μm. 1-3 and 0-3 piezocomposites as well as other highly loaded structures (maximum 45 % in volume) have been elaborated. Moreover, PZT thick films have been deposited on metallic substrates and silicon wafers. After sintering, crack-free PZT films with thickness ranging between 12 to hundreds of microns have been metallized and polarized. The properties of these microstructures have been studied with permittivity and piezoelectric coefficients measurements. Experiments have shown that the piezoelectric properties of PZT ceramics fabricated by stereolithography are promising (d33 up to 200 pC/N and g33 greater than 30×10-3 Vm/N), which implies that such structures could be integrated in MEMS for microactuators or sensors applications. Finally, simultaneous fabrications by conventional stereolithography of polymer micropumps and their related piezoelectric transducers have been tested. The upper polymer member of the micropump is 100 μm thick and the inner diameter of the pump is 5 mm. Researches are in progress to improve the micropump flow rate and to manufacture a drop-on-demand inkjet device.
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Olivier Dufaud, Olivier Dufaud, Herve Le Gall, Herve Le Gall, Serge Corbel, Serge Corbel, "Stereolithography of lead zirconate titanate ceramics for MEMS applications", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.498777; https://doi.org/10.1117/12.498777

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