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24 April 2003 Vibration measurement of microcomponents by fringe projection method
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This paper presents an optical fringe projection method for measuring the dynamic micro-components. Using a programmable liquid crystal display (LCD) projector and a long working distance microscope (LDM), sinusoidal fringes are projected onto a micro-component. The image of the fringe pattern is captured by another LDM and a high-speed camera and subsequently processed by the Fast Fourier Transform (FFT) technique. A simple procedure is described which enables calibration of the optical setup for subsequent amplitude and frequency measurement of the vibrating components. To overcome the underexposure problem, a white light source (WLS) is incorporated and the dynamic range of the camera is increased by a factor of 6. Discrepancy in the measured vibration amplitude is less than 1%.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tao Wu, ChoJui Tay, Chenggen Quan, Shihua Wang, and HuaiMin Shang "Vibration measurement of microcomponents by fringe projection method", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003);

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