10 November 2003 Results of a long-term test of an ArF mini-excimer laser
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Proceedings Volume 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; (2003) https://doi.org/10.1117/12.515516
Event: XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2002, Wroclow, Poland
Abstract
A mini-excimer laser with a specially designed laser tube was operated at a constant energy of 8 mJ and a constant repetition rate of 500 Hz at 193 nm. A long-term test of this laser system was done. The output energy was constant over the test interval of 1.5 billion pulses. The pulse-to-pulse stability was constant over the total test period. The test was done without changing or cleaning the resonator optics.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andreas Goertler, C. Hartmann, C. Strowitzki, "Results of a long-term test of an ArF mini-excimer laser", Proc. SPIE 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (10 November 2003); doi: 10.1117/12.515516; https://doi.org/10.1117/12.515516
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