Study of an ion source by an excimer laser

Vincenzo Nassisi; A. Pedone; D. Doria

doi:10.1117/12.515846

10 November 2003 Study of an ion source by an excimer laser

Vincenzo Nassisi, A. Pedone, D. Doria

Proceedings Volume 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; (2003) https://doi.org/10.1117/12.515846
Event: XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2002, Wroclow, Poland

Abstract

We present the experimental results concerning the study and the development of a Laser Ion Source (LIS). By means of an excimer laser we irradiated a metal target at high power density, realizing an efficient source of multiple charged ions. The analysis of the generated plasma plume was performed for three different laser spot sizes, determining the threshold conditions of the ablation process. A diagnostic system with a Faraday cup was developed in order to detect the ion current along a propagation tube. Time-of-flight (TOF) measurements were performed, also inserting in front of the cup an adjustable voltage electrostatic barrier in order to get quantitative information about the ion flux and the kinetic energy of the produced ions. To study the plasma characteristics we evaluated the total etched material per pulse, 0.25 μg, and the fractional ionization, 12%. The ablated material distribution was monitored by optical transmission analysis of a deposited film. Applying a high voltage to the LIS extraction gap, an ion beam containing Cu+1(0.44mA), Cu+2(0.34mA), Cu+3(0.09mA), and Cu+4(0.01mA) was obtained.

Citation Download Citation

Vincenzo Nassisi, A. Pedone, and D. Doria "Study of an ion source by an excimer laser", Proc. SPIE 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (10 November 2003); https://doi.org/10.1117/12.515846

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