Laser-induced heterogeneous processes at deposition of elements from vapors of transition-metal carbonyles

Sergay A. Mulenko

doi:10.1117/12.515614

2 September 2003 Laser-induced heterogeneous processes at deposition of elements from vapors of transition-metal carbonyles

Sergay A. Mulenko

Author Affiliations +

Proceedings Volume 5121, Laser Processing of Advanced Materials and Laser Microtechnologies; (2003) https://doi.org/10.1117/12.515614
Event: Laser Processing of Advanced Materials and Laser Microtechnologies, 2002, Moscow, Russian Federation

Abstract

Two carbonyls of transition-metal Mo(CO)₆ and Fe(CO)₅ were used for laser chemical vapor deposition (LCVD) of elements under the action of KrF-laser radiation (λ_L= 248 nm) and Ar⁺-laser radiation (λ_L= 448 nm) on SiO₂ and Si substrate surface. The rate constant of heterogeneous reaction of Mo atoms deposition was K(T)≅1.1x10⁶ cm/s at Mo(CO)₆ vapor pressure of 0.1 Torr and KrF-laser power density of 1.9x10⁷ W/cm² while irradiating SiO₂ substrate surface. The same rate constant of Fe atoms deposition was K(T)≅3.4x10⁶cm/s at Fe(CO)₅ vapor pressure of 5 Torr and KrF-laser power density of 3.0x10⁶W/cm² while irradiating SiO₂ substrate surface. This rate constant was K(T)≅1.2x10^-3cm/s and 2.8x10^-3cm/s at Fe(CO)₅ vapor pressure of 5 Torr and Ar⁺-laser power density of 10² W/cm² while irradiating Si and SiO₂ substrate surface accordingly. Kinetic data of atomic concentrations demonstrated that during of the initial stage of element deposition the content of deposited films reflects mainly chemical processes on the substrate surface and as irradiation time is being increased, the composition of films reflects mainly gas phase processes above the substrate surface.

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Sergay A. Mulenko "Laser-induced heterogeneous processes at deposition of elements from vapors of transition-metal carbonyles", Proc. SPIE 5121, Laser Processing of Advanced Materials and Laser Microtechnologies, (2 September 2003); https://doi.org/10.1117/12.515614

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