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2 September 2003 Multilayered films deposition from laser plume in a high-intensity electrostatic field
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Proceedings Volume 5121, Laser Processing of Advanced Materials and Laser Microtechnologies; (2003) https://doi.org/10.1117/12.515615
Event: Laser Processing of Advanced Materials and Laser Microtechnologies, 2002, Moscow, Russian Federation
Abstract
Pulsed laser deposition in a uniform high-intensity electrostatic field was used to grow multilayered 56Fe/MoSx/57Fe films. The ions of laser-generated plume were significantly accelerated by counter flat fine-cell grid electrode, which was positively charged regarding the substrate. The difference of potentials was 50 kV. This method was recognized to be promising for the efficient intermixing processes in the MoSx/57Fe interface thus initiating the new chemical bond formation in the interfacial layers. By penetrating through the interface the ions gave rise to growth of amorphous layer consisting of rather evenly distributed Fe, S and Mo atoms. The characteristic property of the ion-induced chemical reaction was that the sulfur atoms have efficiently made bonds with iron (FeS2 type) while the molybdenum atoms transformed into the metallic state and were localized in the environment of Fe atoms. The influence of thermo-chemical properties of Fe-Mo-S system on the characteristic features of the ion-induced processes was also studied.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. Yu. Fominski, V. N. Nevolin, A. L. Smirnov, and I. V. Kostichev "Multilayered films deposition from laser plume in a high-intensity electrostatic field", Proc. SPIE 5121, Laser Processing of Advanced Materials and Laser Microtechnologies, (2 September 2003); https://doi.org/10.1117/12.515615
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