22 September 2003 LTCC package for MEMS device
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Proceedings Volume 5124, Optoelectronic and Electronic Sensors V; (2003) https://doi.org/10.1117/12.517066
Event: Optoelectronic and Electronic Sensors V, 2002, Rzeszow, Poland
Abstract
LTCC package of silicon membrane katharometer was made and investigated. The package protects the katharometer against mechanical damage and makes possible an easy connection of electrical signals. Moreover, the heater and temperature sensors allow for obtaining the proper temperature of the element. The basic electrical parameters of the integrated heater and thermistors as well as measured temperature distribution are presented.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Leszek J. Golonka, Leszek J. Golonka, Andrzej Dziedzic, Andrzej Dziedzic, Jan Dziuban, Jan Dziuban, Jaroslaw Kita, Jaroslaw Kita, Tomasz Zawada, Tomasz Zawada, } "LTCC package for MEMS device", Proc. SPIE 5124, Optoelectronic and Electronic Sensors V, (22 September 2003); doi: 10.1117/12.517066; https://doi.org/10.1117/12.517066
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