Microelectronic humidity RC-sensors on the basis of composite material

Zenon Hotra; Olexandra Hotra; Vitaly Grigoriew; Oleg Melnyk; Danuta Proszak

doi:10.1117/12.517048

22 September 2003 Microelectronic humidity RC-sensors on the basis of composite material

Zenon Hotra, Olexandra Hotra, Vitaly Grigoriew, Oleg Melnyk, Danuta Proszak

Proceedings Volume 5124, Optoelectronic and Electronic Sensors V; (2003) https://doi.org/10.1117/12.517048
Event: Optoelectronic and Electronic Sensors V, 2002, Rzeszow, Poland

Abstract

The problem of application of offered composition material in humidity capacity type sensors and in sensors based on RC structures is considered.

Citation Download Citation

Zenon Hotra, Olexandra Hotra, Vitaly Grigoriew, Oleg Melnyk, and Danuta Proszak "Microelectronic humidity RC-sensors on the basis of composite material", Proc. SPIE 5124, Optoelectronic and Electronic Sensors V, (22 September 2003); https://doi.org/10.1117/12.517048

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