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22 September 2003 Microelectronic humidity RC-sensors on the basis of composite material
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Proceedings Volume 5124, Optoelectronic and Electronic Sensors V; (2003) https://doi.org/10.1117/12.517048
Event: Optoelectronic and Electronic Sensors V, 2002, Rzeszow, Poland
Abstract
The problem of application of offered composition material in humidity capacity type sensors and in sensors based on RC structures is considered.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zenon Hotra, Olexandra Hotra, Vitaly Grigoriew, Oleg Melnyk, and Danuta Proszak "Microelectronic humidity RC-sensors on the basis of composite material", Proc. SPIE 5124, Optoelectronic and Electronic Sensors V, (22 September 2003); https://doi.org/10.1117/12.517048
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