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22 September 2003 Micromachining technology in optoelectronic sensing technologies
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Proceedings Volume 5124, Optoelectronic and Electronic Sensors V; (2003) https://doi.org/10.1117/12.517046
Event: Optoelectronic and Electronic Sensors V, 2002, Rzeszow, Poland
Abstract
This paper examines the contribution of MEMS/MOEMS technology in the specific context of optical fiber sensing technology. A number of demonstrator sensors will be discussed, with special emphasis to sensors with micromachined integrated optic structures, nano-scale SNOM sensors, and fiber-to-waveguide coupling systems.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christophe Gorecki "Micromachining technology in optoelectronic sensing technologies", Proc. SPIE 5124, Optoelectronic and Electronic Sensors V, (22 September 2003); https://doi.org/10.1117/12.517046
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