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24 October 2003 Automated system for interferometric out-of-plane and in-plane microelements measurement
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Proceedings Volume 5125, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments; (2003) https://doi.org/10.1117/12.531537
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2002, 2002, Wilga, Poland
Abstract
The automated system for microelement testing, which consists of Twyman-Green interferometer and waveguide grating interferometer integrated with optical microscope is presented. The microsocpe is additionally equipped with mechanisms to fix, microposition and load a specimen under study. Full-field analysis of out-of-plane and in-plane displacements of microelements is performed at this study. The applicability of the system is proven by performing test of silicon membrane and silicon beam.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jacek Marcin Kacperski, Tomasz Sykula, Malgorzata Kujawinska, and Leszek A. Salbut "Automated system for interferometric out-of-plane and in-plane microelements measurement", Proc. SPIE 5125, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments, (24 October 2003); https://doi.org/10.1117/12.531537
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