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30 September 2003 A control device: a beam structure of charged particles
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Abstract
For maintenance repeatability technological of ion processing, it is necessary to support density of ion current and distribution density of ion current by constants. For this purpose the control device of ion sources with a wide beam has been developed. In this work the device for exact reproduction structure of a beam negatively or positively charged particles, is described. Calculation mistakes of measurement currents for the given device are resulted.
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A. N. Kozlov, V. D. Smolyaninov, A. P. Eremin, and A. M. Filachev "A control device: a beam structure of charged particles", Proc. SPIE 5126, 17th International Conference on Photoelectronics and Night Vision Devices, (30 September 2003); https://doi.org/10.1117/12.517368
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