30 September 2003 The 1x384 hybrid linear infrared focal plane arrays on InAs MOS structure for spectrometric applications
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Abstract
Technology and design of linear 1x384 MIS photodetectors on InAs homoepitaxial substrate are developed. The experimental results on IR focal plane arrays (IR FPA) intended for rapid IR spectrometers with registration time 0,1 - 50 ms are presented.
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V. M. Bazovkin, V. M. Bazovkin, N. A. Valisheva, N. A. Valisheva, A. A. Guzev, A. A. Guzev, V. M. Efimov, V. M. Efimov, Anatolii P. Kovchavtsev, Anatolii P. Kovchavtsev, Georgii L. Kuryshev, Georgii L. Kuryshev, I. I. Lee, I. I. Lee, A. S. Stroganov, A. S. Stroganov, } "The 1x384 hybrid linear infrared focal plane arrays on InAs MOS structure for spectrometric applications", Proc. SPIE 5126, 17th International Conference on Photoelectronics and Night Vision Devices, (30 September 2003); doi: 10.1117/12.517247; https://doi.org/10.1117/12.517247
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