23 July 2003 Epitaxial metallic electrodes, quantum dots, and wires for application in solid state qubit technology
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Proceedings Volume 5128, First International Symposium on Quantum Informatics; (2003) https://doi.org/10.1117/12.517878
Event: First International Symposium on Quantum Informatics, 2002, Lipki, Russian Federation
Abstract
A road map for the fabrication of epitaxial metallic electrodes, quantum dots and wires is considered for potential application in solid-state qubit technology. The nanotechnology developed includes high quality low-roughness film epitaxy, probe lithography and subtractive techniques for the fabrication of epitaxial nanostructures with a lateral resolution down to 10 nm.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ludmila I. Aparshina, Ludmila I. Aparshina, Anatoliy V. Chernykh, Anatoliy V. Chernykh, Lev Fomin, Lev Fomin, Ilia V. Malikov, Ilia V. Malikov, Valery Yu. Vinnichenko, Valery Yu. Vinnichenko, Gennady M. Mikhailov, Gennady M. Mikhailov, } "Epitaxial metallic electrodes, quantum dots, and wires for application in solid state qubit technology", Proc. SPIE 5128, First International Symposium on Quantum Informatics, (23 July 2003); doi: 10.1117/12.517878; https://doi.org/10.1117/12.517878
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