New chelation clean process for removing gallium from the focused-ion-beam repaired mask

Same-Ting Chen; Tzy-Ying Lin; Chue-San Yoo

doi:10.1117/12.504063

28 August 2003 New chelation clean process for removing gallium from the focused-ion-beam repaired mask

Same-Ting Chen, Tzy-Ying Lin, Chue-San Yoo

Proceedings Volume 5130, Photomask and Next-Generation Lithography Mask Technology X; (2003) https://doi.org/10.1117/12.504063
Event: Photomask and Next Generation Lithography Mask Technology X, 2003, Yokohama, Japan

Abstract

Repairing mask defects with Focused Ion Beam (FIB) of gallium often results in a gallium-implanted area due to scan. This implanted layer reduces the light transmission by up to 10 ~ 30 percent, depending on the wavelength. This effect of localized transmission loss becomes printable at the extremes of focus-energy matrix of wafer printing. The existing methods for the gallium removal give rise to quartz damage, side-etching or critical dimension (CD) variation. We propose a mild and new gallium-removing clean process. This process is based on the concept of gallium chelation with designed water-soluble polymers attached with several ligands for chelation. After our CHP1011 post-treatment, from 193nm MSM (Microlithography Simulation Microscope) analysis, the intensity of the scanned area can increase from 88% to 97%. The CHP1011 treatment can enhance the intensity of the repair area by 20% and CD by 15% from 193nm MSM simulation.

Citation Download Citation

Same-Ting Chen, Tzy-Ying Lin, and Chue-San Yoo "New chelation clean process for removing gallium from the focused-ion-beam repaired mask", Proc. SPIE 5130, Photomask and Next-Generation Lithography Mask Technology X, (28 August 2003); https://doi.org/10.1117/12.504063

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available