SMIF capability at Intel Mask Operation improves yield

Thuc H. Dam; Matt Pekny; Jim Millino; Gibson Luu; Nitesh Melwani; Aparna Venkatramani; Malahat Tavassoli

doi:10.1117/12.504267

28 August 2003 SMIF capability at Intel Mask Operation improves yield

Thuc H. Dam, Matt Pekny, Jim Millino, Gibson Luu, Nitesh Melwani, Aparna Venkatramani, Malahat Tavassoli

Proceedings Volume 5130, Photomask and Next-Generation Lithography Mask Technology X; (2003) https://doi.org/10.1117/12.504267
Event: Photomask and Next Generation Lithography Mask Technology X, 2003, Yokohama, Japan

Abstract

At Intel Mask Operations (IMO), Standard Mechanical Interface (SMIF) processing has been employed to reduce environmental particle contamination from manual handling-related activities. SMIF handling entailed the utilization of automated robotic transfers of photoblanks/reticles between SMIF pods, whereas conventional handling utilized manual pick transfers of masks between SMIF pods with intermediate storage in Toppan compacts. The SMIF-enabling units in IMO's process line included: (1) coater, (2) exposure, (3) developer, (4) dry etcher, and (5) inspection. Each unit is equipped with automated I/O port, environmentally enclosed processing chamber, and SMIF pods. Yield metrics were utilized to demonstrate the effectiveness and advantages of SMIF processing compared to manual processing. The areas focused in this paper were blank resist coating, binary front-end reticle processing and 2nd level PSM reticle processing. Results obtained from the investigation showed yield improvements in these areas.

Citation Download Citation

Thuc H. Dam, Matt Pekny, Jim Millino, Gibson Luu, Nitesh Melwani, Aparna Venkatramani, and Malahat Tavassoli "SMIF capability at Intel Mask Operation improves yield", Proc. SPIE 5130, Photomask and Next-Generation Lithography Mask Technology X, (28 August 2003); https://doi.org/10.1117/12.504267

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