A new in situ method for testing the optical thickness of removed transparent elements

Iliya Emeliyanovich Kozhevatov; Evgeny A. Rudenchik; Nikolai P. Cheragin; Elena H. Kulikova

doi:10.1117/12.518185

26 September 2003 A new in situ method for testing the optical thickness of removed transparent elements

Iliya Emeliyanovich Kozhevatov, Evgeny A. Rudenchik, Nikolai P. Cheragin, Elena H. Kulikova

Proceedings Volume 5134, Current Research on Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002; (2003) https://doi.org/10.1117/12.518185
Event: Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002, 2000, Unknown, United States

Abstract

A new remote method for a fast inspection of the optical thickness of transparent elements is developed. The method is based on the use of an high order interference of white light reflected from the sample's sides. Method gives a possibility for in situ measuring the optical thickness of the sample with accuracy to ~0.5 nm on aperture before 100mm and distance as far as some meters.

Citation Download Citation

Iliya Emeliyanovich Kozhevatov, Evgeny A. Rudenchik, Nikolai P. Cheragin, and Elena H. Kulikova "A new in situ method for testing the optical thickness of removed transparent elements", Proc. SPIE 5134, Current Research on Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002, (26 September 2003); https://doi.org/10.1117/12.518185

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