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26 September 2003 Differential low-coherence interferometry
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Proceedings Volume 5134, Current Research on Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002; (2003) https://doi.org/10.1117/12.518189
Event: Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002, 2000, Unknown, United States
Abstract
New low coherence interferometric technique for remote comparison of two optical path differences utilizing common path geometry is proposed and demonstrated. The differential profiling of transparent structures by new technique is considered and demonstrated experimentally. In the experiment, nanometer accuracy of differential profiling is achieved, and high noise immunity of the proposed technique is demonstrated. The "sample-etalon" version of the technique is proposed which enables measurement of optical path difference with better noise immunity, than conventional low coherence interferometry. High noise immunity of the technique allows its efficient application for in situ precision measurements of geometric parameters of micro- and nanostructures in adverse environments.
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Vadim V. Ivanov, Vadim A. Markelov, and Sergei S. Ustavshikov "Differential low-coherence interferometry", Proc. SPIE 5134, Current Research on Holography and Interferometric Methods for Measurement of Object Properties: 2000-2002, (26 September 2003); https://doi.org/10.1117/12.518189
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