30 May 2003 Paired interferometric measurement of planarity and parallelism
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An interferometric method to test plane parallel plates both for planarity and parallelism of the end faces is reported. The method requires that the plates are reflective or temporarily metal coated. Measurements are taken by insertion of the plates in a reference cavity. The optical configuration uses a standard programmable interferometer with an external right angle prism folding back the probe beam. The prism error is determined by cavity calibration, and is subtracted at data reduction. The measuring procedure is discussed in detail, and results of a laboratory demonstration are presented.
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Maurizio Vannoni, Maurizio Vannoni, Giuseppe Molesini, Giuseppe Molesini, } "Paired interferometric measurement of planarity and parallelism", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); doi: 10.1117/12.501263; https://doi.org/10.1117/12.501263


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