Simple polarization phase shifting for scatterplate interferometry

Krzysztof Patorski; Leszek A. Salbut

doi:10.1117/12.500009

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30 May 2003 Simple polarization phase shifting for scatterplate interferometry

Krzysztof Patorski; Leszek A. Salbut

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Proceedings Volume 5144, Optical Measurement Systems for Industrial Inspection III; (2003) https://doi.org/10.1117/12.500009
Event: Optical Metrology, 2003, Munich, Germany

Abstract

Simple polarized light implementation of the phase shifting method for analyzing fringe patterns formed in Burch's common-path scatterplate interferometer has been proposed. The systems employs circularly polarized beam at the input end, a quarter wave plate to change the rotation direction of circular polarization of the reference beam, and a rotating analyzer placed in two counter-rotating circular polarization beams at the output of the interferometer. The simplicity of our approach is proved theoretically and experimentally. Problems related to non-ideal light modulation at the interferometer output and the ways to overcome them are discussed.

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Krzysztof Patorski and Leszek A. Salbut "Simple polarization phase shifting for scatterplate interferometry", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); https://doi.org/10.1117/12.500009

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