30 May 2003 Some topics in surface and nanometrology
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Abstract
Some problems associated with surface metrology instrumentation and theory are discussed. In particular problems in Nanometrology are highlighted with reference to Markov processes and fractal analysis. A systems approach to surface characterization is suggested.
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David J. Whitehouse, David J. Whitehouse, } "Some topics in surface and nanometrology", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); doi: 10.1117/12.508362; https://doi.org/10.1117/12.508362
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